Nanoelectronics and Nanofabrication
Contamination refers to the unintended introduction of foreign substances, particles, or impurities into a material or environment, which can negatively impact the properties and functionality of nanoscale devices. In the context of physical vapor deposition methods, contamination can occur during the deposition process, affecting the quality of the thin films being created. It is crucial to manage contamination effectively to ensure the reliability and performance of nanoscale components.
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